JPS645879Y2 - - Google Patents

Info

Publication number
JPS645879Y2
JPS645879Y2 JP16778383U JP16778383U JPS645879Y2 JP S645879 Y2 JPS645879 Y2 JP S645879Y2 JP 16778383 U JP16778383 U JP 16778383U JP 16778383 U JP16778383 U JP 16778383U JP S645879 Y2 JPS645879 Y2 JP S645879Y2
Authority
JP
Japan
Prior art keywords
wiping
liquid
tank
belt
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16778383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6076034U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16778383U priority Critical patent/JPS6076034U/ja
Publication of JPS6076034U publication Critical patent/JPS6076034U/ja
Application granted granted Critical
Publication of JPS645879Y2 publication Critical patent/JPS645879Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP16778383U 1983-10-27 1983-10-27 半導体装置，部品表面などの拭き取り装置 Granted JPS6076034U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16778383U JPS6076034U (ja) 1983-10-27 1983-10-27 半導体装置，部品表面などの拭き取り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16778383U JPS6076034U (ja) 1983-10-27 1983-10-27 半導体装置，部品表面などの拭き取り装置

Publications (2)

Publication Number Publication Date
JPS6076034U JPS6076034U (ja) 1985-05-28
JPS645879Y2 true JPS645879Y2 (en]) 1989-02-14

Family

ID=30366985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16778383U Granted JPS6076034U (ja) 1983-10-27 1983-10-27 半導体装置，部品表面などの拭き取り装置

Country Status (1)

Country Link
JP (1) JPS6076034U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069491Y2 (ja) * 1987-03-24 1994-03-09 関西日本電気株式会社 半導体ウェーハ用ブラシスクラブ装置

Also Published As

Publication number Publication date
JPS6076034U (ja) 1985-05-28

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